Advanced Energy Unveils Centra Smart Hub for Improved Temperature Measurement in Next-Generation Semiconductor Tools
Advanced Energy launched the Centra Smart Hub at SEMICON West in San Francisco, a centralized hub supporting up to eight Remote Smart Sensors for non-contact wafer-temperature measurement in semiconductor thermal tools. The company claims up to a 40% accuracy improvement over standard solutions at 3.3 um or 5.2 um wavelengths and temperatures up to 1700°C, targeting rapid thermal annealing and epitaxial growth for Si and SiC processes.
Key figures
- Max temperature
- 1700°C
- Sensors supported
- 8
- Accuracy improvement
- up to 40%
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