ACM Research Enhances Single-Wafer Hot SPM System with Sulfuric Acid Recycle Capability
ACM Research announced an enhanced version of its 170°C Single-Wafer Hot SPM system featuring a new sulfuric acid recycle capability validated by a foundry customer across more than 50 process layers. The new capability achieves a 70% sulfuric acid recycle rate and is expected to save approximately 400 tons of sulfuric acid per tool annually, delivering cost and environmental benefits.
Key figures
- Particle count
- 15 or fewer at 15 nm and above
- Validated process layers
- more than 50
- Sulfuric acid recycle rate
- 70%
- Annual sulfuric acid savings per tool
- approximately 400 tons
AI analysis
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