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Onto Innovation Completes Strategic Investment in Rigaku Holdings Corporation

$ONTOPress releaseAug 10, 2026, 8:00 AM ETRead the release

Onto Innovation closed a strategic investment to acquire a 27% minority equity stake in Rigaku Holdings Corporation for approximately $720 million. The deal, purchased from an affiliate of Carlyle, deepens a partnership focused on developing X-ray-based process control solutions for semiconductor manufacturing.

Key figures

Deal Value Usd
720000000
Investment currency
113,078,356,600 yen
Ownership percentage
27%

AI analysis

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AI-generated analysis of a public disclosure. Not investment advice; verify against the original document.